JPH0477130U - - Google Patents
Info
- Publication number
- JPH0477130U JPH0477130U JP12067790U JP12067790U JPH0477130U JP H0477130 U JPH0477130 U JP H0477130U JP 12067790 U JP12067790 U JP 12067790U JP 12067790 U JP12067790 U JP 12067790U JP H0477130 U JPH0477130 U JP H0477130U
- Authority
- JP
- Japan
- Prior art keywords
- fixing table
- substrate fixing
- spray chamber
- substrate
- spray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000007921 spray Substances 0.000 claims description 6
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 230000037431 insertion Effects 0.000 claims description 2
- 238000003780 insertion Methods 0.000 claims description 2
- 239000006185 dispersion Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990120677U JP2527674Y2 (ja) | 1990-11-16 | 1990-11-16 | スペーサ散布装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990120677U JP2527674Y2 (ja) | 1990-11-16 | 1990-11-16 | スペーサ散布装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0477130U true JPH0477130U (en]) | 1992-07-06 |
| JP2527674Y2 JP2527674Y2 (ja) | 1997-03-05 |
Family
ID=31868572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990120677U Expired - Lifetime JP2527674Y2 (ja) | 1990-11-16 | 1990-11-16 | スペーサ散布装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2527674Y2 (en]) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63161626A (ja) * | 1986-12-25 | 1988-07-05 | Toshiba Corp | 基板処理方法 |
| JPH0194319A (ja) * | 1987-10-07 | 1989-04-13 | Matsushita Electric Ind Co Ltd | 液晶表示パネルのスペーサ材分散装置 |
| JPH01210868A (ja) * | 1988-02-18 | 1989-08-24 | Tdk Corp | 電圧センサ及び電圧測定装置 |
-
1990
- 1990-11-16 JP JP1990120677U patent/JP2527674Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63161626A (ja) * | 1986-12-25 | 1988-07-05 | Toshiba Corp | 基板処理方法 |
| JPH0194319A (ja) * | 1987-10-07 | 1989-04-13 | Matsushita Electric Ind Co Ltd | 液晶表示パネルのスペーサ材分散装置 |
| JPH01210868A (ja) * | 1988-02-18 | 1989-08-24 | Tdk Corp | 電圧センサ及び電圧測定装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2527674Y2 (ja) | 1997-03-05 |